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Indian Institute of Technology Delhi
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Microelectronics Lab I



1. Sputtering System: Metal Deposition

    Multi-target RF sputtering system (Alcatel) for Metal deposition

SAP Lab

2. Sputtering System: Oxide Deposition

  1. RF sputtering system for oxide and dielectric deposition
  2. With reactive sputtering compatibility

SAP Lab

3. Thermal Evaporation

    Thermal evaporation system (varian 3117) for metallization for Al depostion

SAP Lab

4. ABM Mask Aligner

  1. ABM mask aligner for multilayer lithography
  2. Wavelength 365 nm and 405 nm
  3. Ziesss Microscope and Suess Microtech Spin coater

SAP Lab

5. Reactive Ion Etching

  1. Reactive Ion Etching System for Si and SiO2 etching
  2. Equipped with SF6 and CHF3 gases

SAP Lab

6. Diffusion Furnace

  1. Diffusion furnaces (Thermoco product cooperation)
  2. Used for Solid sate diffusion process

SAP Lab

7. Oxidation and Metal Annealing

  1. Oxidation furnaces (Thermoco product cooperation)
  2. Used Silicon oxidation

SAP Lab