Microelectronics Lab II

1. I-V Measurment

1. I-V Measurement setup equipped with probe station (4-probe)
2. Keithley Source-meter 2400 (single channel) and 2636B (dual channel)

2. Multi Target DC and RF Magnetron sputtering System

Metal deposition ( Pulse DC Magnetron Power Supply), equipped with load lock system

3. Electrodeposition System (Gamry Instruments Inc.)

4. Multi Target RF sputtering (SCM 450 Alcatel)

5. CVD furnaces (2) (Metrex)

6. Gas sensing System (for VOC and Toxic)

7. Optical Measurements

Photodetector characterization: Responsivity, Time response, Band width Measurements

1. Multichannel (4-channel) fiber coupled laser source (Thorlabs)
2. Broadband (300-2600 nm) fiber coupled light source (Thorlabs)
3. 20 MHz Function generator (Agilent)
4. 60 MHz Two channel Digital Oscilloscope (Tektronix)
5. SRS830 DSP Lock-in Amplifier (Stanford research System)