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Microelectronics Lab II



1. I-V Measurment

  1. I-V Measurement setup equipped with probe station (4-probe)
  2. Keithley Source-meter 2400 (single channel) and 2636B (dual channel)

SAP Lab

2. Multi Target DC and RF Magnetron sputtering System

Metal deposition ( Pulse DC Magnetron Power Supply), equipped with load lock system

SAP Lab

3. Electrodeposition System (Gamry Instruments Inc.)

SAP Lab

4. Multi Target RF sputtering (SCM 450 Alcatel)

SAP Lab

5. CVD furnaces (2) (Metrex)

SAP Lab

6. Gas sensing System (for VOC and Toxic)

SAP Lab

7. Optical Measurements

Photodetector characterization: Responsivity, Time response, Band width Measurements

  1. Multichannel (4-channel) fiber coupled laser source (Thorlabs)
  2. Broadband (300-2600 nm) fiber coupled light source (Thorlabs)
  3. 20 MHz Function generator (Agilent)
  4. 60 MHz Two channel Digital Oscilloscope (Tektronix)
  5. SRS830 DSP Lock-in Amplifier (Stanford research System)

SAP Lab