Microelcetronics Lab

Sputtering System: Metal Deposition


Multi-target RF sputtering system (Alcatel) for Metal deposition

Sputtering System: Oxide Deposition


RF sputtering system for oxide and dielectric deposition

Thermal Evaporation


Thermal evaporation system (varian 3117) for metallization for Al depostion

ABM Mask Aligner


ABM mask aligner for multilayer lithography

Reactive Ion Etching


Multi-target RF sputtering system (Alcatel) for Metal deposition

Diffusion Furnace


RF sputtering system for oxide and dielectric deposition

Oxidation and Metal Annealing


Multi-target RF sputtering system (Alcatel) for Metal deposition