CARE | Faculty | Prof. Sudhir Chandra

Prof. Sudhir Chandra
Professor

About
Research Interest
Contact Information
Funded Project
Student Project
PhD Scholar
Publication

About

Prof. Sudhir Chandra obtained M.Sc. (Physics) from Bareily College, Bareily (Agra University) in 1970, M.Tech in Solid State Physics from IIT Delhi in 1972 and Ph.D. in the area of Microelectronics in 1980 from IIT Delhi.He contributed significantly in Planning and establishing Microelectronics Laboratory at CARE IIT Delhi.He joined CARE as project scientist in 1977 and became a faculty member in 1981. He is currently working on silicon micromachining devices.

Course Offered

CRP723 - Fabrication Techniques of RF and Microwave Devices

Research Interest

1. Microelectronics Technology

2. Silicon IC Technology.

3. SOI devices.

4. Silicon Micromachining.

Contact Information

Email	schandra@care.iitd.ernet.in
Telephone	(O) +91-11-26591105
Facsimile	+91-11-26596219
Address	Centre for Applied Research in Electronics, Indian Institute of Technology, Delhi Hauz Khas, New Delhi - 110 016, INDIA

Funded Projects

"Development of Biosensor and Micro-techniques for Analysis of Pesticide Residues, Aflatoxin, Heavy Metals and Bacterial Contamination in Milk", NAIP, Indian Agriculture Research Institute, Rs. 1.5 crore (April 2008- March 2014).
"Wafer Bonding and Layer Transfer for Novel Engineered Substrates (RP-01951)",Investigators: Dr. Rajendra Singh (PI), Prof. Sudhir Chandra Co-PI, DST, Rs. 25.50 Lakhs.
"Wafer Bonding and Layer Transfer for Novel Engineered Substrates (MI00490)", Investigators: Dr. Rajendra Singh (PI), Prof. Sudhir Chandra Co-PI, Max-Planck Institute, Germany (Rs. 10.938 Lakh). .
"Performance Evaluation and Optimization of Opto-mechanic Sensing Systems and Related Technologies", BARC, Starting date: August 2011 (duration 21 months). Investigators: Sudhir Chandra (PI), Dr. S Tuli, Prof. K.Thyagarajan (Phy. Dept). Rs. 48.3 Lkh.
"Design and Development of Prototype Microfluidic MEMS", Investigators: Sudhir Chandra (PI), Dr. G.Bose, Dr. S Tuli, (CARE), Dr. A.L.Vyas (IDDC), Dr. A Darpe (ME), Dr. PMV Subbarao (ME), Dr. Ratan Mohan (Ch.E), Prof. K.Thyagarajan (Phy. Dept), BARC, Rs. 46 Lakhs, (2007-09).
"MEMS Based Micro-cantilevers for Chemical and Biochemical Sensors", Investigators: Prof. Sudhir Chandra (PI), Dr. G.Bose, Prof. Suneet Tuli, Dr. Nivedita Gohil and Dr. A.L.Vyas, DST, Rs. 25 Lakhs, (2005-07).
"IC Compatible Piezoelectric Films for Sensors", Investigators: Sudhir Chandra (PI), Dr. G.Bose, Dr. Suneet Tuli, Prof. T.C.Goel (Physics Department), DTSR (DRDO), 3-years (starting December 2002). Rs.23.69 Lakhs.
"Development of MEMS Based Micro-Switch", Investigators: Dr. Sudhir Chandra (PI), Dr. G.Bose, Dr. Suneet Tuli, NPSM B-SMART Program, Rs. 15 Lakhs, 2 years (starting: October 2001).
"Relays for Launch Vehicle Using Silicon Micromachining Technology Phase-III", Investigators: Dr. Sudhir Chandra (PI), Dr. G.Bose, Dr. Suneet Tuli, VSSC ISRO, (1999-2000) Rs. 2 Lakhs .
"Relays for Launch Vehicle Using Silicon Micromachining Technology Phase-II", Investigators: Dr. Sudhir Chandra (PI), Dr. G.Bose, Dr. S.C. Rustagi, RESPOND Program, ISRO, (1997-99), Rs. 8.5 Lakhs.
"Relays for Launch Vehicle Using Silicon Micromachining Technology Phase-I", Investigators: Dr. Ami Chand (PI), Dr. Sudhir Chandra (PI), Dr. G.Bose, Dr. S.C.Rustagi (1995-97).
"Design and Development of Silicon Micromachined Pressure Sensor", Investigators Dr. S.C. Rustagi (PI), Dr. Ami Chand, Dr. Sudhir Chandra, Dr. G.Bose, DST Rs. 13 Lakhs (1995-98).
"Design and Development of Silicon Micromachined Pressure Sensor Phase-II", Investigators Dr. S.C.Rustagi, Dr. B.S.Panwar, Dr. Sudhir Chandra, Dr. G.Bose, DST (1999-2000).
"Silicon Micromachined Microwave Components", Dr. Ami Chand, Dr. Sudhir Chandra, Dr. S.C.Rustagi, Dr. G.Bose, AICTE (1996-1999), Rs. 7 Lakhs.
Photonic Mission Project "Technology Development for Integrated Optic Power Divider/Splitter" Investigators: Dr. Sudhir Chadra (PI), Dr. G.Bose, Dr. S.C.Rustagi, Dr. Ami Chand, Dr. B.S.Panwar, Dr. Sheel Aditya, Dr. Devi Chada, MHRD Rs. 24.7 Lakhs, 1995-98.
"Development of SOI MOS Structures on Polysilicon, Buried Insulators and Their Application to 3-D CMOS Technology", Investigators: Dr. Sudhir Chandra (PI), Dr. A.B. Bhattacharyya, Dr. S.C. Rustagi, Dr. Ami Chand, Dr. G.Bose, DoE, Rs. 82 Lakhs, 1988-1992.
"Analog Signal Processing Subsystems for Radar and Sonar Application (ASPS)", Investigators Prof. A.B. Bhattacharyya (PI), Prof. D. Nagchoudhuri, Prof. J.vas, Dr. Sudhir Chandra, Dr. P.Sudhakar and others (1978-84), DoE, Rs. 56 Lakhs.
"Development of Computer Aids in the Design of MOS/CCD Circuits, Phase-I", Investigators: Prof. A.B. Bhattacharyya (PI), Dr. D. Nagchoudhuri, Dr. S.C. Rustadi, Dr. Sudhir Chandra, and others, DRDO, 19.5 Lakhs, 1979-82 .
"Development of Computer Aids in the Design of MOS/CCD Circuits, Phase-II", Investigators: Prof. A.B.Bhattacharyya (PI), Dr. D.Nagchoudhuri, Dr.S.C. Rustadi, Dr. Sudhir Chandra, and others, DRDO, 23.6 Lakhs, 1984-89 .
"Development of Test Structures and Schemes for Integrated Circuits and Study of Electromigraton", Investigators: Prof. A.B. Bhattacharyya (PI), Dr. S.C. Rustagi, Sudhir Chandra, and others, DST, 13.45 Lakhs, 1986-90 .
"Training of DPRK (North Korea) Engineers" , Investigators: Prof. A.B. Bhattacharyya (PI), Dr. Sudir Chandra, Dr. B.S Panwar, and others, UNIDO, Rs. 4.35 Lakhs, 1981.
"Development of Analog Gate Array and SCL Engineers" , Training, Investigators: Prof. A.B.Bhattacharyya, Dr. S.C.Rustagi Dr.Sudhir Chandra, Dr. Sudhir Aggarwal, Dr. G.Bose, Dr. B.S Panwar (1984- ), SCL, Rs. 31.8 Lakhs.

Consultancy Projects

"Process and Study of Boron and Nitrogen Implantation in Stainless Steel", Kurushetra University Rs. 19,950 Dr. Ami Chand (CI) and Dr. Sudhir Chandra.
"Dry Metallization Techniques for Zener Diodes" , Greaves Semiconductors Ltd. Rs. 30,000, Professor A.B.Bhatacharyya, Dr. S.C.Rustagi, Dr. Ami Chand, Dr. B.S.Panwar, Dr. Sudhir Chandra, 1986.
"Hands-on-Training for Solar Cell Fabrication", Rs. 25,000 Garg Associates Sudhir Chandra (CI), and Dr. G.Bose (2000-01).

M.Tech Project

Veerendra Dhyani, "Fabrication of Metal Microstructures for MEMS", SSM, (Physics Department, Co-supervisor: Prof. Vikram Kumar), 2013.
Esah Thakur, "Fabrication of Indium Tin Oxide Thin Film for Gas Sensor", SSM, (Physics Department, Co-supervisor: Dr. Mukesh C Bhatnagar), 2013.
Prasoon Kumar, "Design and Development of DC MEMS Switch", RFDT (CARE)", 2013.
Aanchal Ahuja, "Studies on Fibre Optic Fabry-Perot Pressure Sensor", Opto-electronics (Co-Supervisor: Prof. K Thyagarajan), 2013.
Devendra Singh, "Study on Fibre Optic Fabry-Perot Sensor", Optoelectronics (Physics and EE Deptt.)(Co-Supervisors Prof. K. Thyagarajan), 2012.
Prashant Kumar, "Carbon Nano-tube Based Chemical Sensor", IEC, EE Department, 2012.
Vanparia Kashyap, "Movable Structures for Microwave MEMS Application", RFDT, (Co-Supervisor: Prof. S K Koul), 2011.
C Parthiban, "MEMS Based Capacitive Pressure Sensor", RFDT 2011.
Vikas, "MEMS Based Piezoresistive Pressure Sensor", RFDT 2011.
Raj Kumar, "Development of Optical Technique for Resonant Frequency Measurement of Microstructures Including MEMS Microcantilevers", Opto-Electronics, (Co-supervisor: Prof. A. L. Vyas), 2011..
Bhawna Dhingra, "Optical Interrogation of a Pressure Sensor fabricated Using MEMS Technology", Opto-Electronics, (Co-supervisor: Prof. K Thyagarajan), 2011.
Ankur Soam, "The Design and Fabrication of Microheater in MEMS for GAS Sensor", SSM, Physics Department, (Co-supervisor: Dr. M C Bhatnagar), 2010.
Bhagaban Behera, "Preparation and Characterization of Porous Silicon for Biochemical Sensors", SSM, Physics Department, (Co-supervisor: Dr. Rajendra Singh, Physics Deptt.), 2010.
Deepash Shekhar Saini, "Preparation and Characterization of SiO2 Dielectric Film by Using Sol-gel Spin Coating Process for Microelectronics and MEMS", SSM, Physics Department, (Co-supervisor: Dr. Rajendra Singh, Physics Deptt.), 2010.
Somsing Rathod, "ZnO Based Film Bulk Acoustic Resonator (FBAR)", RFDT(CARE), (Co-supervisor: Prof. S K Koul), 2010.
Tarun Mudgal, "Silicon-glass Anodic bonding for MEMS applications", SSM, Physics Department, (Co-supervisor: Dr. Rajendra Singh), 2009.
Sachin Vardam, "Micro-cantilever Based Chemical Detector", M.Tech. IEC, EE Dept., (Co-supervisor: Dr. A L Vyas), 2008.
Ajay Kumar Kambham, "Wafer Bonding and Grinding/Etch-back Method for Fabrication of Silicon-on-Insulator (SOI)", SSM, Physics Department, (Co-supervisor: Dr. Rajendra Singh), 2008.
Bharat Bhushan, "Wafer Bonding for MEMS Application", Physics Department, (Co-supervisor: Dr. Rajendra Singh), 2007.
Mahesh Kumar Agarwal, "Semiconductor Parameter Measurement Through Test Structures", M.Tech. IEC (EE Deptt.), 2007.
Vivek Gupta, "RF Sputtered Aluminum Oxide Films for MEMS and MOS", SSM, Physics Department, May 2006.
Mahesh Kumar, "RF Sputtered Piezoelectric ZnO Films for MEMS Based Vibration Sensor", SSM, Physics Department, 2005.
Shivam Mishra, "Fabry-Perot Cavity Based Pressure Sensors", Optoelectronics and Optical Communication, EE and Physics Dept., (Co-supervisors: Prof. K. Thyagarajan, and Dr. V.K. Suri, BARC), 2005.
Kuldeep Sharma , "Development of Micro Electro Mechanical Systems (MEMS) Based Capacitive Pressure Sensor", (Co-Supervisor: Prof. T.C.Goel and Dr. Anita Topkar, BARC), May 2004.
Sandeep Sharma , "Preparation and Characterization of Sol-Gel Derived PLZT Thin Films", (Solid State Materials , Physics Department Co-supervisor: Prof. T.C.Goel), 2002.
Ravinder Singh , "Fabrication and Characterization of Micro-Electro-Mechanical-Systems (MEMS) Based on Modified PZT Thin Films", (Solid State Materials, Physics Department Co-supervisor: Prof. T.C.Goel), 2001.
Shakun Kumar Garg , "Development of MEMS Based Coplanar Waveguide for High Frequency Circuits", M.Tech Project.
Rajmohan Bhandari, "Design and Development of Diaphragm Based Silicon Micromachining", (Co-Supervisor: Dr. M.C.Bhatnagar), 2000.
Sandeep Negi, "Development of Electrostatic Driven Cantilever for Microswitch", (Co-Supervisor Prof. D.C.Dube), 2000.
Munish Kumar, "Fabrication of Single Crystal Silicon Solar Cell by Low Cost Process", (Energy Studies, Co-Supervisor: Prof. R.P.Dahiya), 2000.
Monika Vishnoi, "Development of IR Bolometer Using Silicon Micromachining Technology",(Co-supervisor: Dr.R.K.Soni), 1997.
Rajeevan Chandel, "Electrostatic Micro-actuator Using Direct Wafer Bonding Technology", (Co-supervisor: Dr. M.Jagadesh Kumar), 1997.
Pankaj Kumar Sharma, "Development of Pig-tailing Schemes for Integrated Optical Waveguides", (Co-supervisor: Prof. Sheel Aditya), 1997.
Roopa Choudhuri, "Design and Development of Flip Chip Bonding Technique for Alignment and Pigtailing of Glass Waveguides", (Co-supervisor: Prof. Devi Chada), 1996.
Bhaskar D.Barma, "Packaging Techniques for Silicon Micromachined Devices", 1995.
Sunita Kothari, "Computer Aided Design and Technology Development of Integrated Optic waveguides for Optical Systems", (Co-supervisor: Dr. Sheel Aditya), 1995.
F.A.Boromand, "Rapid Thermal Annealing of Hydrogen Implanted SiO2-Si3N4 Gate Polysilicon SOI MOSFETs", (Co-supervisor: Dr. Ami Chand), 1992.
Rajesh K.Dhunna, "Preliminary Investigation of Diffusion, Oxidation, and Etching Characteristics of LPCVD Polycrystaline Silicon Film", 1984.

M.Sc. Project

Tanu Agarwal,"Preparation and Characterization of Ferroelectric Materials", (Department of Physics, Supervisors: Prof. T.C.Goel and Dr. Sudhir Chandra), 2003.
Anika Kumar, "Preparation and Characterization of Europium Modified PZT Thin Filma for Application in Pyroelectric Sensors", (Physics Department, Supervisor: Prof. T.C. Goel and Dr. Sudhir Chandra), 2002.

B.Tech Project

Chandan Bagdia,"Zinc Oxide Based Gas Sensor", B. Tech. Engineering Physics, (Co-Supervisor: Dr. Rajendra Singh), Minor Project, 2013.
Gaurav Goel, "Silicon-Insulator Interface Characterization for MOS Devices", EE Deptt. (Incomplete at the end of the Semester), 2008.
Akash Nigam, "Fabrication of Cantilevers Based Device for Micro-actuation Using Anodic Bonding", (from AICIT, Gandhinagar, Gujrat), May 2008.
Ashish Duggal, "Design and Fabrication of Capacitive Pressure Sensor", EE Department, (Supervisors: Dr. Sudhir Chandra and Dr. Suneet Tuli), 2003.
Abhishek Dular and R Deepak, "Design and Fabrication of MEMS Switch", EE Department, (Supervisor: Dr. Sudir Chandra), 2003.
Hemraj Meena and Santosh Sharan, "Design, Simulation, and Fabrication of Silicon Piezoresistive Pressure Sensor", EE Department, (Supervisor: Dr. Sudir Chandra and Dr. G.Bose), 2003.
Prashant Nagnath Sarwade and Sami Alam, "Design and Fabrication of a MEMS Based Vibration Sensor", EE Department, (Supervisors: Dr. Sudhir Chandra and Dr. Suneet Tuli), 2003.
Saurabh Shrivastava and Vikas Verma , "Design and Fabrication of Accelerometer", EE Department, (Supervisors: Dr. Sudhir Chandra and Dr. Sunet Tuli), 2003.
Amit Sharma and Deepesh Jain, "Design and Fabrication of an Integrated Voltage Multiplier for Silicon Micromachined Relays", EE Dept., (Dr. Sudhir Chandra and Dr. Ami Chand), 1997.

Ongoing

Ruchi Tiwari
Area :Dielectric and Semiconducting Thin Films for MEMS Prototyping.
Supervisor :Prof. Sudhir Chandra
Teweldebrhan Kifle Fiseha
Area :RF MEMS.
Supervisor :Prof. Sudhir Chandra and Prof. S. K. Koul
Bhagaban Behera
Area : Synthesis of Nanostructured Oxides and Their Integration with MEMS for Sensors
Supervisor :Prof. Sudhir Chandra
Shivam Mishra, Ph.D. registration in Homi Bhabha National Institute, Mumbai.
Supervisor :Prof. Sudhir Chandra and Dr. Balasubramaniam from BARC.

Completed

Sudhir Aggarwal
Area : A Few Performance Enhancement Techniques for LSI Compatible Analog MOS Circuits.
Supervisor :Dr. Sudhir Chandra and Prof. A. B. Bhattacharyya, Completed in 1997.
Janak Singh
Area : Some Aspects of Silicon Micromachining Technology for MEMS Applications.
Supervisor :Dr. Sudhir Chandra , Completed in 1998.
Prem Pal
Area : Some Novel Processes and Techniques for MEMS Design, Fabrication and Characterization.
Supervisor :Dr. Sudhir Chandra and Prof. Suneet Tuli, Completed in 2004.
Ravindra Singh
Area :Preparation and Characterization of Ferroelectric / Piezoelectric Thin Films of PLZT / ZnO and Their Integration with MEMS Processing .
Supervisor :Dr. Sudhir Chandra and Prof. T. C. Goel, Completed in 2008.
Preeti Sharma
Area : Studies on Micromachined Structures for RF Application.
Supervisor :Dr. Sudhir Chandra and Prof. S.K. Koul , Completed in 2009.
Vivekanand Bhatt
Area : Investigation of RF Sputtered Films for Rapid Prototyping of Micro-Electro-Mechanical-Systems (MEMS).
Supervisor :Dr. Sudhir Chandra, Completed in 2009.
Atu Vir Singh
Area :Investigation of Sputter Deposited Silicon Carbide and Aluminum Nitride Films for MEMS Technologies.
Supervisor :Dr. Sudhir Chandra and Prof. G. Bose, Completed in 2013.
Uday Dadwal
Area :Synthesis of Novel Substrates by Wafer Bonding / Layer Transfer .
Supervisor :Dr. Sudhir Chandra and Dr. Rajendra Singh(Physics Department), Completed in 2013.
Hardik Jeetendra Pandya
Area :Novel Techniques for MEMS-Based VOC Sensors Using Nanostructured Oxides.
Supervisor :Dr. Sudhir Chandra and Prof. A. L. Vyas(IDDC), Completed in 2013.

In Refereed International Journals

Ruchi Tiwari and Sudhir Chandra, "Low Temperature Silicon-to-Silicon Anodic Bonding Using Sodium Rich Glass for MEMS Applications", Journal of Electronic Materials DOI: 10.1007/s11664-013-2844-0, Published online Nov. 07, 2013.
Ruchi Tiwari, Sudhir Chandra and B. R. Chakraborty, "Preparation, Characterization and Application of RF Sputter Deposited Boron Doped Silicon Dioxide Thin Films", Material Science in Semiconductor Processing, vol. 16, no. 6, pp. 2013-20, Dec. 2013.
Ruchi Tiwari and Sudhir Chandra, "Piezoresistive Pressure Sensor Using Low-Temperature Aluminium Induced Crystallization of Sputter-Deposited Amorphous Silicon Film", J. Micromech. Microeng. , vol. 23, no. 9, pp. 9, 2013. doi:10.1088/0960-1317/23/9/095020.
U. dadwal, R. Scholz, M. Reiche, P. Kumar, S. Chandra and R. Singh, "Effect of Implantation Temperature on the Blistering Behavior of Hydrogen Implanted GaN," Applied Physics A [online], Nov. 2012.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "A Novel Sensor for VOCs Using Nanostructured ZnO and MEMS Technologies," Sensors & Transducers Journal, vol. 14-1, Special Issue, pp. 244-252, March 2012.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "Integration of ZnO Nanostructures with MEMS for Ethanol Sensor," Sensor and Actuator B, vol. 161, pp. 923– 928, 2012.
Atul Vir Singh, Sudhir Chandra, Sushil Kumar and G. Bose, "Mechanical and Structural Properties of RF Magnetron Sputter Deposited Silicon Carbide Films for MEMS Applications", Journal of Micromechanics and Microengineering, 22(2012) 025010 (7pp).
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "A Simple Technique to Grow Long Vertically Aligned CuO Nanowires on Oxidized Silicon Substrate," Nanoscience and Nanotechnology Letters, vol. 3, pp. 773–777, 2011.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "Fabrication and Characterization of Low Temperature Acetone Sensor Using CuO Nanowires," Nanoscience and Nanotechnology Letters, vol. 3, pp. 744–748, 2011.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "MEMS Based Ethanol Sensor using ZnO Nanoblocks, Nanocombs and Nanoflakes as Sensing Layer," Sensors and Transducers, vol. 134, pp. 85-94, 2011.
Atul Vir Singh, Sudhir Chandra, A. K. Srivastava, B. R. Chakraborty, G. Sehgal, M. K. Dalai, and G. Bose, "Structural and Optical Properties of RF Magnetron Sputtered Aluminum Nitride Films Without External Substrate Heating", (Accepted June 13, 2011), Applied Surface Science 257, (2011), pp. 9568– 9573.
Atul Vir Singh, Sudhir Chandra and Gouranga Bose, "Fabrication of Micro-cantilevers Using RF Magnetron Sputtered Silicon Carbide Films," Advanced Materials Research, vol. 254, pp. 163-166, 2011.
Somsing Rathod, Atul Vir Singh, Sudhir Chandra and Shiban K. Koul, "Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators," Advanced Materials Research, vol. 254, pp. 144-147, 2011, © Trans Tech Publications, Switzerland, doi:10.4028/www.scientific.net/AMR.254.144
Ruchi Tiwari and Sudhir Chandra, "Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering," Advanced Materials Research, vol. 254, pp. 187-190, 2011 , © (2011) Trans Tech Publications, Switzerland, doi:10.4028/www.scientific.net/AMR.254.187
Atul Vir Singh, Sudhir Chandra, and G. Bose, "Deposition and Characterization of C-axis Oriented Aluminum Nitride Films by Radio Frequency Magnetron Sputtering Without External Substrate Heating," Thin Solid Films[online], vol. 519, pp. 5846-5853, 2011.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "Nanostructured ITO Thin Films by RF Sputtering for Acetone Sensor," International Journal of Nanoscience, vol. 10, Issue 1-2, pp. 271-274, 2011. doi: 10.1142/SO219581X11007909.
R. Tiwari and S. Chandra, "The Silicon-to-silicon Anodic Bonding Using Sputter Deposited Intermediate Glass Layer," Journal of Nano- and Electronic Physics, vol. 3, no. 1, part 2, pp. 418-425, 2011.
H. J. Pandya and S. Chandra, "Zinc Oxide Nanostructures by Oxidation of Zinc Films Deposited on Oxidized Silicon Substrate," Journal of Nano- and Electronic Physics, vol. 3, no. 1, part 2, pp. 409-413, 2011.
H. J. Pandya, Sudhir Chandra and A. L. Vyas, "Fabrication and Characterization of Ethanol Sensor based on RF Sputtered ITO Films," Sensors and Transducers Journal, vol. 10, Special Issue, pp. 141-150, Feb. 2011. (ISSN 1726-5479)
A K Srivastave, Praveen, M. Arora, S K Gupta, B R Chakraborty and S Chandra, "Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films", J. Mater. Sci. Technol, 26 (11), pp. 986-990, 2010.
A. K. Srivastava, K. Ninagawa, S. Toyoda, B. R. Chakraborty and S. Chandra, "Induced Thermoluminescence of X-ray Irradiated Nanostructured Zinc Oxide," Optical materials, vol. 32, pp. 410-412, 2009.
Sudhir Chandra, Vivekanand Bhatt and Ravindra Singh, "RF Sputtering: A Viable Tool for MEMS Fabrication," Sadhna, Special Issue, vol. 34, no. 4, pp. 543-556, Aug. 2009. [J-42]
Vivekanand Bhatt, Sudhir Chandra and Chatar Singh, "Microstructures Using RF Sputtered PSG Film as a Sacrificial Layer in Surface Micromachining," Sadhna, Special Issue, vol. 34, no. 4, pp. 557-562, Aug. 2009.
Ravindra Singh, T. C. Goel and Sudhir Chandra, "A New Approach to Integrate PLZT Thin Films with Micro-cantilevers", Sadhna, Special Issue, vol. 34, no. 4, pp. 563-572, Aug. 2009.
Avanish K. Srivastava, Bibhash R. Chakraborty and Sudhir Chandra, "Crystallographically Oriented Nanorods and Nanowires of RF Magnetron Sputtered Zinc Oxide," Journal of Nanomaterials, vol. 2009, Article ID 310360 (5 pages), 2009.
Vivekanand Bhatt and Sudhir Chandra, "Silicon Nitride Films Deposited by RF Sputtering for Microstructure Fabrication in MEMS," Journal of Electronic Materials, vol. 38, no. 9, pp. 1979- 1989, 2009.
Vivekanand Bhatt and Sudhir Chandra, "Investigation of RF Sputtered PSG Films for MEMS and Semiconductor Devices," Microelectronics Engineering, vol. 86, pp. 24-32, 2009.
Ravindra Singh, B.R. Chakraborty, Nahar Singhb, Harish Bahadur, T.C. Goel and Sudhir Chandra, "Compositional and Structural Analysis of RF Magnetron Sputtered La+3 Modified PZT Thin Films," Journal of Materials Processing Technology, vol. 209, Issue 2, pp. 991-997, Jan. 19, 2009. doi: 10.1016/j.jmatprotec.2008.03.008 (March 2008).
Ravindra Singh, T.C.Goel, and Sudhir Chandra, "RF magnetron Sputtered La3+ - Modified PZT Films: Perovskite Phase Stabilization and Properties," Materials Chemistry and Physics, 110 (1), p. 384, 2008.
Ravindra Singh, T.C. Goel and Sudhir Chandra, "Effect of Post-Deposition Annealing on Phase Formation and Properties of RF Magnetron Sputtered PLZT Thin Films", Materials Research Bulletin, vol. 43, pp. 384-393, 2008.
Harish Bahadur, A. K. Srivastava, Rashmi and Sudhir Chandra (2008), "Effect of Sol Strength on Growth, Faceting and Orientation of Sol-Gel Derived Zno Nanostructures," IEEE Sensors Journal, vol. 8, no. 6, pp. 831-36 June 2008.
Harish Bahadur, A.K. Srivastave, R.K. Sharma and Sudhir Chandra, "Morphologies of Sol-Gel Derived Thin Films of ZnO Using Different Precursor Materials and their Nanostructures," Nanoscale Research Letters, vol. 2, pp. 469-475, 2007.
Harish Bahadur, A.K. Srivastava, Divi Haranath, Harish Chander, A.Basu, S.B. Samanta, K.N. Sood, Ram Kishore, R.K. Sharma, Rashmi, Vivekanand Bhatt, Prem Pal and Sudhir Chandra, "Nano-structured ZnO films by sol-gel process," Ind. J. Pure & Appl. Phys. , vol. 45, pp. 395-399, 2007.
Prem Pal, Kazuo Sato and Sudhir Chandra, "Fabrication Techniques of Convex Corners in a (100)–Silicon Wafer Using Bulk Micromachining: a Review", J. Micromechanics and Microengineering [online], vol. 17, pp. 111-133, Sept. 18, 2007. Available: stacks.iop.org/JMM/17/R111
K. Srinivasan, P. M. V. Subbarao, S. R. Kale and S. Chandra, "Fabrication and Interface Characterization of a Microchannel System Using a Simple Alignment Technique," Sensor Letters, vol. 5, no. 3, pp. 1-8, 2007.
Preeti Sharma, Shiban K. Koul and Sudhir Chandra, "Fabrication and Characterization of Millimeter-Size Dielectric Membranes Prepared by RF Sputtering and Bulk Micromachining," Sensor Letters, vol.5, no.3/4, pp. 552-558, Sept. /Dec. 2007.
Vivekanand Bhatt and Sudhir Chandra, "Silicon Dioxide Films by RF Sputtering for Microelectronic and MEMS Applications," Journal of Micromechanics and Microengineering, vol. 17, pp. 1066-77, Apr. 2007.
Sudhir Chandra, Vivekanand Bhatt, Ravindra Singh, Preeti Sharma and Prem Pal, "MEMS Prototyping Using RF Sputtered Films," Indian Journal of Pure and Applied Physics, vol. 45, pp. 326-331, Apr. 2007.
Vivekanand Bhatt, Sudhir Chandra, Sushil Kumar, C.M.S. Rauthan and P.N. Dixit, "Stress Evaluation of RF Sputtered Silicon Dioxide Films for MEMS," Indian Journal of Pure and Applied Physics, vol. 45, pp. 377-381, Apr. 2007.
Preeti Sharma, S.K. Koul and S. Chandra, "Studies on RF MEMS Shunt Switches," Indian Journal of Pure and Applied Physics, vol. 45, pp. 387-394, April 2007.
Vivekanand Bhatt and Sudhir Chandra, "Planar Microstructures Using Modified Surface Micromachining Process," Sensor Letters, vol. 5, no. 2, pp. 387-391, June 2007.
Ravindra Singh, Mahesh Kumar and Sudhir Chandra, "Growth and Characterization of High Resistivity C-axis Oriented ZnO Films on Different Substrates by RF Magnetron Sputtering for MEMS Applications," Journal of Materials Science [online], vol. 42, no. 12, pp. 4675-4683, June 2007. Available: http://dx.doi.org/10.1007/s10853-006-0372-5, Jan. 31, 2007.
Harish Bahadur, S.C. Garg, S.B. Samanta, A.K. Srivastava, K.N. Sood, R. Kishore, R. K. Sharma, A.Basu, Rashmi, M. Kar, Prem. Pal, Vivekanand Bhatt and Sudhir Chandra, "Nano and Micro Structural Studies of Thin Films of ZnO," Journal of Materials Science, vol. 41, no. 22, pp. 7562-7570, Oct. 2006.
Prem pal, Young-Jun Kim and Sudhir Chandra, "Front-to-Back Alignment Techniques in Microelectronics/MEMS Fabrication: A Review," Sensor Letters [online], vol. 4, pp.1-10, Mar. 2006. Available: http://www.aspbs.com/sensorlett2006.htm
Seema Sharma, Ravindra Singh, T.C.Goel and S. Chandra, "Synthesis, Structural and Electrical properties of La Modified PZT System," Computational Materials Science, vol. 37, pp. 86-89, 2006.
Ravindra Singh, Seema Sharma, Sudhir Chandra, and T.C.Goel, "Dielectric, Ferroelectric, and Electrical Properties of Sol-Gel Prepared La Modified PZT Thin Films," Ferroelectrics, vol. 328, pp. 27-32, 2005.
Harish Bahadur, R.K.Sharma, Vivekanand Bhatt, Prem Pal and Sudhir Chandra, "Scanning Tunneling Microscope Investigations of Thin Films of ZnO," Chiang Mai Journal of Science, vol. 32, no. 3, pp. 439-445, 2005.
Prem Pal and Sudhir Chandra, "RF Sputtered Silicon for MEMS", Journal of Micromechanics and Microengineering, vol. 15, pp. 1536-1546, Jun. 28, 2005.
Vivekanand Bhatt, Prem Pal and Sudhir Chandra, "Feasibility Study of RF Sputtered ZnO Film for Surface Micromachining," Surface and Coatings Technology, vol. 198, pp. 304-308, 2005, (available on line Nov. 24, 2004).
Prem Pal and Sudhir Chandra, "Bulk-micromachined Structures inside Anisotropically Etched Cavities" Smart Materials and Structures, vol. 13, pp. 1424-1429, 2004.
Prem Pal and Sudhir Chandra, "Recessed Microstructures with Perfect Convex Corners for Accelerometers," Sensor Letters, vol. 2, no. 3-4, pp. 226-231, Sept-Dec. 2004.
Prem Pal and Sudhir Chandra, "A Novel Process of Perfect Convex Corner Realization in Bulk Micromachining", Journal of Micromechanics and Microengineering, vol. 14, pp. 1416-1420, 2004.
Prem Pal, Suneet Tuli and Sudhir Chandra, "A New Technique of Front-To-Back Alignment for MEMS," Sensor Letters, vol. 2, no. 1, pp. 78-81, Mar. 2004.
Ravindra Singh, Sudhir Chandra, Seema Sharma, A.K.Tripathi, and T.C.Goel, "Sol-Gel Derived La Modified PZT Thin Films; Structure and Properties" IEEE Transactions on Dielectric and Electrical Insulation, vol. 11, no. 2, pp. 264-270, Apr. 2004.
Prem Pal, Suneet Tuli, and Sudhir Chandra, "Design and Fabrication of SiO2 Micromechanical Structures Inside Anisotropically Etched Cavity" International Journal of Computational Engineering Science (IJCES), vol. 4, no. 3, pp. 489-492, Sept. 2003.
Sudhir Chandra, Vivekanand Bhatt, and Shrawan Kumar, "Sputtered Silicon Dioxide Films for MEMS Application", International Journal of Computational Engineering Science (IJCES), vol. 4, no. 3, pp. 521-524, Sept. 2003.
Sudhir Chandra and Janak Singh, "Capacitance-Voltage Measurement Technique as a Tool for In Situ Characterization of Electrochemical Etching of Silicon," J. Electrochemical Soc., vol. 146 (3), pp. 1206-1214, 1999.
Janak Singh, Sudhir Chandra, and Ami Chand, "Strain Studies in LPCVD Polysilicon for Surface Micromachining Devices," Sensors and Actuators A Physical, 77, pp. 133-138, 1999.
S.C.Rustagi, Zain O. Mohsen, Sudhir Chandra, and Ami Chand, "C-V Characterization of MOS Capacitor in SOI Structures," Solid State Electronics, vol. 39, No. 6, pp. 841-849, 1996.
S.C.Rustagi, Zain O. Mohsen, Sudhir Chandra, and Ami Chand, "Synthesis of Buried Silicon Nitride Layers by Rapid Thermal Annealing", Thin Solid Films, 164, pp. 429-34, 1988.
L.Shankar Narayanan, A.B.Bhattacharyya and Sudhir Chandra, "A Simple High Frequency Characterization of a Three Phase CCD by Controlled Free Charge Transfer", Solid State Electronics, vol. 31, no. 1, pp. 121-23, 1988.
Sudhir Aggarwal, A.B.Bhattacharyya, and Sudhir Chandra, "A Novel Two Dimensional MOS Transistor for Analogue Application," Solid State Electronics, vol. 30, no. 12, p. 1323, 1987.
A.B. Bhattacharyya, Sudhir Chandra and D. Nagchoudhuri, "Physical and Electrical Properties of RF Plasma Grown Al2O3 and AlN Insulators on Silicon," J.IETE, vol. 26, no.2, p. 110, 1980.

In Refereed International Conferences and Symposium

Sudhir Chandra, Hardik Jeetendra Pandya, Anoop Lal Vyas, "A Methanol Sensor Incorporating Nanostructured ZnO and Integrated Micro-heater on Thermally Isolated Planar MEMS Platform," SENSORDEVICES -2012, Rome Italy, pp. 83-88, Aug. 20-25, 2012.
Sudhir Chandra, Hardik Pandya and Anoop Vyas, "Integration of MEMS with Nanostructured Metal-oxide Materials for Improved Sensors for Volatile Organic Compounds", XVIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2011), IIT Kanpur, Dec. 19-22, 2011. (Invited Talk)
Atul Vir Singh, Sudhir Chandra, Sushil Kumar and G. Bose, "Mechanical Properties of RF Magnetron Sputtered SiC Film by Nano-indentation," XVIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2011), IIT Kanpur, Dec. 19-22, 2011.
Bhawna Dhingra, K.Thyagarajan, Sudhir Chandra and Ruchi Tiwari, "Optical Interrogation of a Pressure Sensor Fabricated Using MEMS Technology," XVIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2011), IIT Kanpur, Dec. 19-22, 2011.
Ruchi Tiwari and Sudhir Chandra, "Preparation of Nanocrystalline Polysilicon Films at Low Temperatures by RF Sputtering and Aluminum-Induced Crystallization," International Conference on Nanotechnology and Nanomaterials (ICANN-2009), IIT Guwahati, Dec. 9-11, 2011.
Hardik Jeetendra Pandya, Sudhir Chandra and Anoop Lal Vyas, "MEMS-based Ethanol Sensor Using Zinc Oxide Nanostructured Films," SENSORDEVICES 2011, Nice, France, Aug. 21-27, 2011.
Sudhir Chandra and Atul Vir Singh, "Preparation and Characterization of Piezoelectric Films of ZnO and AlN by RF Sputtering for RF MEMS Applications," International Conference on Advanced Materials in Microwaves and Optics, Kuala Lumpur, Sept. 26-27, 2011.
Sudhir Chandra, H.J.Pandya and A.L.Vyas, "A Sensor Platform Using Nanostructured Oxides for VOC Monitoring of Environment" 2nd International Conference on Bio-Sensing Technology 2011, Amsterdam, The Netherlands, Oct. 10-12, 2011.
H.J.Pandya, Sudhir Chandra and A.L.Vyas, "MEMS Based Acetone Sensor Using Nanostructured Zinc Oxide Film for Environment Monitoring and Diagnosis," 2nd International Conference on Bio-Sensing Technology 2011, Amsterdam, The Netherlands, 10-12 Oct. 2011.
H.J.Pandya, A.L.Vyas and Sudhir Chandra, "A Complete Electronic Module for Display of Volatile Organic Compound Vapours Using MEMS Based Sensor," 2nd International Conference on Bio-Sensing Technology 2011, Amsterdam, The Netherlands, Oct. 10-12, 2011.
H.J.Pandya, Rupesh Mishra, Sunil Bhand and Sudhir Chandra, "A Novel Micro-Biosensor for Glucose And Mercury Monitoring," 2nd International Conference on Bio-Sensing Technology 2011, Amsterdam, The Netherlands, Oct. 10-12, 2011.
Hardik Jeetendra Pandya, Sudhir Chandra and Anoop Lal Vyas, "Synthesis and Characterization of Cuo Nanowires by Oxidation of Cu Films on Oxidized Silicon and Their Application in Alcohol Sensor," International Conference on Materials for Advanced Technologies (ICMAT-2011), Singapore, Jun. 26-Jul. 1, 2011.
H.J. Pandya, Sudhir Chandra and A.L.Vyas, "A Novel Method of Preparing Nano-Structured Zno on Oxidized Silicon Substrate and its Application in Ethanol Sensing", International Conference on Materials for Advanced Technologies (ICMAT-2011), Singapore, Jun. 26 - Jul. 1, 2011.
U. Dadwal, V. Pareek, R Scholz, M. Reiche, S Chandra and R Singh, "Investigation of Implantation-Induced Damage in Indium Phosphide for Layer Transfer Application", International Symposium on Semiconductor Materials Devices (ISSMD-2011, # 188), Vadodara, Jan. 28-30, 2011.
Sudhir Chandra, H. J. Pandya and A. L. Vyas, "ITO Thin Films by RF Sputtering for Ethanol Sensing", First International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2010), Venice, Italy, pp. 130-34, Jul. 18-22, 2010. doi:10.1109/SENSORDEVICES.2010.31
Sudhir Chandra and Vivekanand Bhatt, "Planar Microstructures in Surface Micromachining Using RF Sputtered PSG and Silicon Nitride Films", XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009), Delhi, Abstract No. 47, p. 31, Dec. 15-19, 2009. (invited talk)
Tarun Mudgal, Ruchi Tiwari and Sudhir Chandra, "Si-Glass Anodic Bonding for MEMS Applications", XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009), Delhi, Abstract No. SM 17, p. 286, Dec. 15-19 2009.
H.J.Pandya, Sudhir Chandra and A.L.Vyas, "Properties of ITO Films prepared by RF Magnetron Sputtering", XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009), Delhi, India, pp. 246-248, Dec. 15-19, 2009.
Atul Vir Singh, G. Bose, and Sudhir Chandra, "A Study on Deposition and Characterization of RF Magnetron Sputtered Aluminum Nitride Films", XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009), Delhi, Abstract No. AM33, p. 101, Dec. 15-19, 2009.
H.J. Pandya, Sudhir Chandra and A.L. Vyas, "Nanostructured ITO Thin Films by RF Sputtering for Acetone Sensor", International Conference on Nanotechnology and Nanomaterials (ICANN-2009), IIT Guwahati, Dec. 9-11, 2009.
Praveen A.K.Srivastava1, Rashmi, B.R. Chakraborty, S. Chandra, S. Toyoda, "Electron Microscopy, Spectroscopy and Luminescence Characteristics of RF Sputtered Nanostructured ZnO Thin Films", The 25th Workshop on ESR Applied Metrology, Hamamatsu, Japan, Mar. 2-4, 2009.
Atul Vir Singh, G.Bose and Sudhir Chandra, "RF Sputtered Silicon Carbide Films for MEMS Applications", ICMEMS 2009, IIT Madras, Jan. 2-5, 2009.
Ravindra Singh and Sudhir Chandra, "Integration of RF Sputtered PLZT Films with MEMS Based diaphragms and Micro-cantilevers", ICMEMS 2009, IIT Madras, Jan. 2-5, 2009.
Akash Nigam, Ravindra Singh, Sachin Vardam and Sudhir Chandra, "A Technique for Fabrication and Packaging of Microcantilevers in MEMS", ICMEMS 2009, IIT Madras, Jan. 2-5, 2009.
Sachin Vardam, Sudhir Chandra, A.L.Vyas, Akash Nigam and Ravindra Singh, "MEMS Microcantilever Based Chemical Detection System", ICMEMS 2009, IIT Madras, Jan. 2-5, 2009.
A.K. Kambham, U. Dadwal, S. Chandra, M. Reiche and R. Singh, "Direct Wafer Bonding and Grinding/Etchback Method for Fabrication of Thick Silicon-on-Insulator (SOI) Substrate", Proc. 17th International Symposium on Processing and Fabrication of Advanced Materials, Vol. 1, pp. 330-340, Dec. 15-18, 2008.
U. Dadwal, S. Chandra, Anandh Subramaniam and R. Singh, "Analysis of Interface Stress in Hetrogeneously Bonded Wafers using Analytical and Finite Element calculations," National Conference on Semiconductor Materials and Technology, Oct. 16-18, 2008.
Harish Bahadur, A.K.Srivastava, Rashmi, and Sudhir Chandra, "Nanostructures in Thin Films of ZnO", Supplemental Proceedings: Materials, Processing and Properties TMS (The Minerals, Metals and Materials Society) ,vol. 1, pp. 485-90, TMS 2008 Annual Meeting & Exhibition, New Orleans, Louisiana, Mar. 9-13, 2008.
Sudhir Chandra and Ravindra Singh, "C-Axis Oriented ZnO Films by RF Sputtering and its Integration with MEMS Processing", MRS Fall Meeting (Nov. 26-30, 2007, Boston, USA), Mater. Res. Soc. Symp. Proc., vol. 1052, 1052-DD03-11, 2008.
V.Gupta, V.Bhatt and S.Chandra, "RF Magnetron Sputtered Aluminum Oxide Films for MEMS", Proc. XIVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2007), pp. 682-685, IIT Bombay, Dec. 16-21, 2007.
Ravindra Singh, T.C. Goel and Sudhir Chandra, "Integration of RF Sputtered ZnO Film with MEMS Based Diaphragms," Proc. XIVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2007), pp. 686-689, IIT Bombay, Dec.16-21, 2007.
Sudhir Chandra, Ravindra Singh, Vivekanand Bhatt and T.C. Goel, "RF sputtered ZnO thin films and their integration with MEMS processing", The 8th Workshop on Biosensors and Bioanalytical Micro-techniques in Environmental and Clinical Analysis, BITS-Pilani Goa Campus (Abstract p. 9), Oct. 3-6, 2007. (Invited Talk)
Sudhir Chandra, Vivekanand Bhatt and Ravindra Singh, "RF Sputtering: a Viable Tool For MEMS Fabrication," IUMRS-ICAM, Bangalore, (p. Abstract B-7), Oct. 8-13, 2007. (Invited Talk)
Vivekanand Bhatt, Sudhir Chandra and Chatar Singh, "Microstructures Using RF Sputtered PSG Film as a Sacrificial Layer in Surface Micromachining," IUMRS-ICAM, Bangalore, (p. Abstract B-9), Oct. 8-13, 2007.
Ravindra Singh, T.C. Goel and Sudhir Chandra, "A New Approach to Integrate PLZT Thin Films with Micro-Cantilevers," IUMRS-ICAM, Bangalore, (p. Abstract B-12), Oct. 8-13, 2007.
Vivekanand Bhatt and Sudhir Chandra, "MEMS Microstructures Using RF Sputtered Silicon Dioxide Films", International Conference on Materials for Advanced Technology (ICMAT-2007), Symposium on MEMS Technology and Devices, Singapore, pp. 33-36, Jul. 1-6, 2007.
Vivekanand Bhatt, Sudhir Chandra and Sushil Kumar, "Stress Investigation of RF Sputtered Si3N4 and SiO2 Films for MEMS", International Conference on Materials for Advanced Technology (ICMAT-2007), Symposium on MEMS Technology and Devices, Singapore, pp. 37-40, Jul. 1-6, 2007.
K. Srinivasan, P.M.V. Subbarao, S.R. Kale and S. Chandra, "Experimental Analysis of Gas Flow through Microchannels in the Slip Flow Regime," National Conference of Research Scholars in Mechanical Engineering, Indian Institute of Technology Kanpur, India, Mar. 23-24, 2007.
Vivekanand Bhatt, Sushil Kumar and Sudhir Chandra, "Structural, optical and mechanical properties of RF sputtered silicon nitride films for MEMS", Proc. International Conference on Emerging Mechanical Technologies: Macro to Nano (EMTM2N-2007), BITS Pilani, pp. 179-183, Feb. 16-18, 2007.
Ravindra Singh, Sudhir Chandra and T.C. Goel, "RF sputtered PLZT thin films and their integration with micro-cantilevers", Proc. International Conference on Emerging Mechanical Technologies: Macro to Nano (EMTM2N-2007), BITS Pilani, pp. 165-170, Feb. 16-18, 2007.
Sudhir Chandra and Vivekanand Bhatt, "A new technique for preparing PSG film using RF magnetron sputtering," Smart Materials, Nano and Micro-Smart Systems, SPIE International Symposium, University of Adelaide, Australia, pp. H1-H9, Dec. 10-13, 2006.
Vivekanand Bhatt and Sudhir Chandra, "Planar microstructures in surface micromachining process using rf sputtered ZnO as sacrificial layer", Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD-06), IEEE sponsored, University of Western Australia, Perth, Dec. 6-8, 2006.
S. Chandra, R. Singh and V. Bhatt, "RF sputtered ZnO for MEMS applications", Proc. Indo-Japan Workshop on ZnO Materials and Devices, University of Delhi, pp. 113-120, Dec. 18-20, 2006. (Invited Paper)
K.Srinivasan, P.M.V. Subbarao, S.R. Kale and S.Chandra, "Fabrication of microchannel array using a simple alignment technique", 33rd National and 3rd International Conference on Fluid Mechanics and Fluid Power, Indian Institute of Technology Bombay, India, Dec. 7-9, 2006.
Vivekanand Bhatt and Sudhir Chandra, "Dielectric Films by RF Sputtering for MEMS Prototyping," National Conference on Smart Structures and MEMS Systems for Aerospace Applictions (Abstract # AB-11), RCI Hyderabad, Dec. 1-2, 2006.
Sudhir Chandra, Vivekanand Bhatt, Ravindra Singh, Preeti Sharma, and Prem Pal, "MEMS prototyping using RF sputtered films", Indo-Chinese Workshop on MEMS Devices and Related Technologies, NPL, New Delhi, Apr. 5-7, 2006. (Invited Talk)
Ravindra Singh, B R Chakraborty, H Bahadur, T.C.Goel, and Sudhir Chandra, "RF Sputtered PLZT Thin Films in Pure Perovskite Phase for MEMS", Indo-Chinese Workshop on MEMS Devices and Related Technologies, NPL, New Delhi, Apr. 5-7, 2006. (Abstract P-18)
V. Bhatt, S. Chandra, S. Kumar, CMS Rauthen, and P.N. Dixit, "Stress Evaluation of RF Sputtered Silicon Dioxide Films for MEMS", Indo-Chinese Workshop on MEMS Devices and Related Technologies, NPL, New Delhi, 5-7 April 2006. (Abstract P-22).
Preeti Sharma, Shiban K. Koul and Sudhir Chandra, "Studies on RF MEMS Shunt Switch", Indo-Chinese Workshop on MEMS Devices and Related Technologies, NPL, New Delhi, 5-7 April 2006. (Abstract P-9).
Ravindra Singh, Sudhir Chandra and T.C. Goel, "Preparation and Characterization of Piezoelectric Thin Films for Bio-sensors", International Workshop on Biosensors for Environmental Analysis, BITS Pilani, Goa Campus, Feb. 21-23, 2006.
Sudhir Chandra, Vivekanand Bhatt, Ravindra Singh, Preeti Sharma, and Prem Pal, "RF Sputtering Process for Rapid Prototyping of MEMS", International Conference on MEMS and Semiconductor Nanotechnology (memsNano), IIT Kharagpur, pp. 84-85, Dec. 20-22, 2005. (Invited Talk)
Harish bahadur, A.K. Srivastava, S.C.Garg, A. Basu, Prem Pal, and Sudhir Chandra, "Nanostructured Features of Thin Films of Zinc Oxide", Proceeding XIIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2005), pp. 335-338, Dec.13-17, 2005.
Vivekanand Bhatt, C.M.Singal, and Sudhir Chandra, "Structure and Optical Properties of RF Sputtered Silicon Nitride Films for MEMS", Proc. XIIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2005), pp. 590-593, Dec.13-17, 2005.
Harish bahadur, S.C.garg, S.B.Samanta, A.Basu, M.Kar, Rashmi, K.N.Sood, Ram Kishore, D.Harnath, Harish Chander, Vivekanand Bhatt, Prem Pal, and Sudhir Chandra, "RF Sputtered Thin Films of ZnO and Their Characterization", Proc. XIIIth Intl. Workshop on the Physics of Semiconductor Devices (IWPSD-2005), pp. 1408-1410, Dec.13-17, 2005.
Ravindra Singh, B.R.Chakraborty, Nahar Singh, Rashmi, Harish Bahadur, T.C.Goel, and Sudhir Chandra, "Phase Formation and Compositional Analysis of PLZT Thin Films Prepared by RF Magnetron Sputtering", Proc. XIIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2005), pp. 1548-1551, Dec.13-17, 2005.
Ravindra Singh, Sudhir Chandra and T.C. Goel, "A Comparative Study of PZT (54/46) and PLZT (8/65/35) Thin Films Prepared by sol-gel Technique", ICMAT-2005, Singapore, Jul. 3-8, 2005.
Ravindra Singh, Mahesh Kumar and Sudhir Chandra, "C-axis Oriented ZnO Thin Films Prepared by RF Magnetron Sputtering without External Substrate Heating", ICMAT-2005, Singapore, Jul. 3-8, 2005.
Harish Bahadur, S.B.Samanta, A.K.Srivastava, K.N.Sood, R.Kishore, A.Basu, Rashmi, M.Kar, P.Pal, V.Bhatt, and S.Chandra, "Nano and Micro Structural Investigations in ZnO Thin Films", ICMAT-2005, Singapore, Jul. 3-8, 2005.
Sudhir Chandra, Vivekanand Bhatt, Prem Pal, Harish Bahadur, K.N.Sood, Ram Kishore, R.P.Pant and S.K.Haldar, "RF Sputtered Materials for MEMS Based Microwave Circuit Components", Asia Pacific Microwave Conference (APMC-2004), New Delhi, pp., Dec. 15-18, 2004.
Preeti Sharma, Shiban K.Koul, and Sudhir Chandra, "Full-Wave Analysis of Micromachined Coplnar Waveguide on Thin Amorphous Silicon Membrane", Asia Pacific Microwave Conference (APMC-2004), New Delhi, pp. 2004, Dec.15-18, 2004.
Preeti Sharma, S.K.Koul, and Sudhir Chandra, "Dielectric Membranes Using Si-Micromachining Technology for RF Circuits", International Conference on Smart Materials, Chiang Mai, Thailand, p. 31, Abstract p. 60, Dec. 1-3, 2004.
Ravindra Singh, Nahar Singh, Prabhat K. Gupta, Rashmi, K.N. Sood, Ram Kishore, Harish Bahadur, T.C.Goel and Sudhir Chandra, "Compositional and Structural Analysis of RF Sputtered PLZT Thin Films", International Conference on Smart Materials, Chiang Mai, Thailand, p. 38, Abstract p. 62, December 1-3, 2004.
Harish Bahadur, R.K.Sharma, Vivekanand Bhatt, Prem Pal, and Sudhir Chandra, "Scanning Tunneling Microscope Investigations of Thin Films of ZnO", International Conference on Smart Materials, Chiang Mai, Thailand, p. 23, Abstract p. 57, Dec. 1-3, 2004.
Sudhir Chandra, Prem Pal, and Vivekanand Bhatt, "Novel Processes in MEMS Fabrication”, National Seminar on Ferroelectrics and Dielectrics (NSFD-XIII), Delhi, Abstract only, Nov. 23-25, 2004. (Invited talk).
Ravindra Singh, Nahar Singh, Rashmi, T.C.Goel, and Sudhir Chandra. "Preparation and Properties of RF Sputtered PLZT Thin Films," Proc. National Seminar on Ferroelectrics and Dielectrics (NSFD-XIII), Delhi, pp. 397-400, Nov. 23-25, 2004.
Harish Bahadur, A. K. Srivastave, Rashmi, K. N. Sood, Ram Kishore, A. Basu, R. K. Sharma, S. B. Samanth, Vivekanand Bhatt, Prem Pal, and Sudhir Chandra, "Characterization of Thin Films of ZnO," Proc. National Seminar on Ferroelectrics and Dielectrics (NSFD-XIII), Delhi, pp. 401-05, Nov. 23-25, 2004.
Harish Bahadur, A.K. Srivastava, Ram Kishore, Rashmi, and Sudhir Chandra, "Electron Microscopic and X-Ray Diffraction Investigations of Nanostructured Thin Film of ZnO", IEEE International Ultrasonics, Ferroelectrics, and Frequency Control (UFFC) 50th Anniversary Joint Conference, Montréal, Canada, Aug. 24-27, 2004.
Prem Pal Sudhir Chandra, and Harish Bahadur, "RF Sputtered Silicon Films for MEMS", International Conference on Thin Film and Nano-Technology (Thin Film-2004), Singapore, Jul. 13-17, 2004.
Vivekanand Bhatt, Prem Pal, and Sudhir Chandra, "Feasibility Study of RF Sputtered ZnO Film for Surface Micromachining", International Conference on Thin Film and Nano Technology (Thin Film-2004), Singapore, Jul. 13-17, 2004.
Prem Pal, Vivekanand Bhatt and Sudhir Chandra, "RF Sputtered Silicon Nitride for LOCOS Process and MEMS", International Conference on Thin Film and Nano Technology (Thin Film-2004), Singapore, Jul. 13-17, 2004.
Ravindra Singh, Seema Sharma, Sudhir Chandra, and T.C. Goel, "Effect of Different La Concentrations on Structural, Dielectric, and Ferroelectric Properties of PLZT Ceramics," National Symposium on Recent Advances in Electroceramics (NSRAE-2004), Meeruth, (Abstract p. 10, # 7.), Apr. 8, 2004.
Vivekanand Bhatt, Sudhir Chandra, K.N.Sood, Ram Kishore, and Harish Bahadur, "Surface Morphology of RF Sputtered Dielectric Thin Films for MEMS," Proc. XXVII Annual Meeting of EMSI and Conference on Electron Microscopy and Allied Fields, pp. 172-73, Apr. 1-3, 2004. (Hitachi Best Paper Award)
Prem Pal, Sudhir Chandra, K.N. Sood, Ram Kishore, and Harish Bahadur, "Physical Characterization of RF Sputtered Silicon for MEMS," Proc. (Abstract) XXVII Annual Meeting of EMSI and Conference on Electron Microscopy and Allied Fields, pp. 174-75, April 1-3, 2004
Harish Bahadur, Ram Kishore, K.N.Sood, Rashmi, R.K.Sharma, A.Basu, D.Harnath, Harish Chander, and Sudhir Chandra, "Characterization of Thin Films of ZnO Prepared by Sol-gel Process", Proceedings of 18th European Frequency and Time Forum (EFTF), University of Surrey, Guildford, UK, to be published by the Institute of Electrical Engineers (IEE), UK, Apr. 2004.
Prem Pal and Sudhir Chandra, "Capacitive Pressure Sensor and Accelerometer Design Using Recessed Microstructure", Proceeding XIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2003), pp. 722-724, Dec.16-20, 2003.
Vivekanand Bhatt, and Sudhir Chandra, "MEMS Microstructures Using RF Sputtered Silicon Nitride Films," Proceedings XIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2003), pp. 740-742, Dec.16-20, 2003.
Harish Bahadur, Ram Kishore, K.N. Sood, Rashmi, D.K. Suri, M. Kar, A. Basu, R.K. Sharma, G. Bose, and Sudhir Chandra, "Preparation and Characterization of ZnO Thin Films on Silicon Substrate Using Sol-Gel Process", Proceedings XIIth International Workshop on the Physics of Semiconductor Devices (IWPSD-2003), pp. 298-300, Dec.16-20, 2003.
Ravindra Singh, Seema Sharma, Sudhir Chandra, and T.C. Goel, "Dielectric Ferroelectric and Electrical Properties of Sol-Gel Prepared La Modified PZT Thin Films," 4th Asian Meeting on Ferroelectrics (AMF-4), Bangalore, A-163, pp. 2-47, Abstract p.131, Dec. 12-15, 2003
Prem Pal, Suneet Tuli, and Sudhir Chandra, "P+ Silicon Recessed Micromechanical Structures for MEMS Application," Proc. Intl. Conf. on Design, Test, Integration, and Packaging of MEMS / MOEMS (DTIP-2003), Mandelieu-La Napoule, Cote d’A France, pp. 378–381, May 5-7, 2003.
Sudhir Chandra (Keynote Address), "Evolution of MEMS in IC Technology," National Conference on Micro Chip Design and Technology, MSIT, New Delhi, Mar. 6-8, 2003.
T.C. Goel, Sudhir Chandra, and Ravinder Singh, "PLZT Based MEMS Devices for Vibration Sensors," National Conference on Ferroelectrics, Bangalore, Dec.16-18, 2002. (Invited Talk by Prof. T.C. Goel).
R. Singh, A.K. Tripathi, S. Chandra, and T.C. Goel, "PLZT Based MEMS Devices", Proc. 11th Intl. Symp. on Electrets, Australia, pp. 397-400, Oct. 2002.
Ravinder Singh, Sudhir Chandra, and T.C. Goel, "Piezoelectric Thin Films for MEMS Application," National Symposium on Materials and Devices (MD-2002), Bareilly, Mar. 9-10 2002. (Invited Talk by Prof. T.C. Goel)
Ravinder Singh, A.K. Tripathi, Sudhir Chandra, and T.C. Goel, "PLZT Based MEMS Devices for Sensors and Actuators," National Seminar on Physics of Materials for Electronic and Optoelectronic Devices (NSPMEOD’02), Jodhpur, Feb. 25-27, 2002 (Invited Talk by Prof. T.C. Goel)
Sudhir Chandra and G. Bose, "Sensors, Actuators, and MEMS in Silicon Technology," Chandigarh Symposium on Microelectronics (CSM), Chandigarh, Feb. 15-16, 2002.
Ravindra Singh, A.K. Tripathi, Sudhir Chandra, and T.C. Goel, "Micro Electro Mechanical Systems (MEMS)," XIth National Symposium on Ultrasonics, Anantpur (A.P), Jan. 10-11, 2002. (Invited Talk by Prof. T.C. Goel)
Ravindra Singh, A.K. Tripathi, Sudhir Chandra, and T.C. Goel, "PLZT Based MEMS for Sensors and Actuators," Seminar on Physics of Materials, Jamia Millia Islamia, New Delhi, Jan. 31, 2002. (Invited Talk by Prof. T.C. Goel)
S. Chandra and H. Nagasawa, "Silicon Carbide on Insulator (SiCOI) Structures by Direct Wafer Bonding Process", XIth International Workshop on Physics of Semiconductor Devices IWPSD-2001, New Delhi, pp. 491-96, Dec. 11-15, 2001. (Invited Paper).
Prem Pal, Prashant Chauhan, Suneet Tuli, G. Bose, and Sudhir Chandra, "Amplitude Measurement of Vibrating Silicon Using Talbot Interferometry," Proceedings XIth International Workshop on Physics of Semiconductor Devices IWPSD-2001, New Delhi, pp. 540-43.23, Dec. 11-15, 2001.
Sudhir Chandra, G.Bose, and Harish Bahadur, "Laser Recrystallization of Polysilicon Films", Proceedings International Workshop on Preparation and Characterization of Technologically Important Single Crystals (PCSC-2001), pp. 577-582, Feb. 26-28, 2001.
Sudhir Chandra, Rajmohan Bhandari, and Sandeep Negi, "Thin Diaphragms for MEMS Applications", Indo-Japanese Workshop on Micro-System Technology, New Delhi, Nov. 23-25, 2000. (Abstract only)
Sudhir Chandra et. al., "Silicon Micromachined Switch," National Seminar on Miniaturization in Aerospace Systems (MAERO-98), RCI Hyderabad, p. BIV-1, 1998. Jan. 2-3, 1998
Sudhir Chandra, Janak Singh, and Ami Chand, "Design and Development of Microstructures for MEMS Applications", SPIE's Symposium on Micromachining and Microfabrication, Austin, Texas, vol. 3226, pp. 22-30, Sept 29-30 1997. (Invited Paper).
Sudhir Chandra, Ami Chand, and Janak Singh, "Silicon Micromachined Sensors and Actuators in Bonded Wafer Technology", Proceedings International Workshop on Physics of Semiconductor Devices IWPSD-97, New Delhi, pp. 463-470, Dec. 16-20, 1997. (Invited Paper).
Sudhir Chandra, "Introduction to Silicon Micromachining Technology," Proc. SERC School of Materials for Advanced Research and Technology (SMART-'97), pp. 38- 47, October 3-17, 1997.
Sudhir Chandra, Ami Chand, Janak Singh, Jagar Singh, and Mahender Kumar, "Development of P+ Silicon Electrostatic Microactuator Using Direct Wafer Bonding Technology", Proceedings 7th International Symposium on IC Technology, Systems and Applications, (ISIC-97), Singapore, pp. 445-448, Sept. 10-12, 1997.
Sudhir Chandra, Ami Chand, Jagar Singh, and Janak Singh, "Silicon Micromachined Switch Using Direct wafer Bonding Technology," Proceedings International Workshop on Physics of Semiconductor Devices (IWPSD-97), pp. 617-620, Dec. 16-20, 1997.
Ami Chand, Janak Singh, and Sudhir Chandra, "Study of Capacitance Voltage Characteristic of Electrochemical Cell for Bulk Silicon Micromachining", SPIE's 1996 International Symposium on Smart Materials, Structures, and MEMS, Bangalore, p. 40, (Abstract), SPIE nol. 3321, Dec. 11-14, 1996.
Janak Singh, Ami Chand and Sudhir Chandra, "Optimization of Stress in LPCVD Polysilicon Films for MEMS Application", SPIE's 1996 International Symposium on Smart Materials, Structures, and MEMS, Bangalore, p. 38, SPIE vol. 3321, pp. 548-553, Dec. 11-14, 1996. (Abstract)
Ami Chand, S. Kukreti, S. Chandra, and S.C. Rustagi, "Realization of Oxide Cantilever Beams Using Silicon Micromachining Technology", Proc. of the 2nd National Seminar on Physics and Technology of Sensors, University of Poona, p. C36-1, Feb 2-4, 1995.
Ami Chand, Janak Singh, Sudhir Chandra, and S.C. Rustagi, "Electrochemical Etch-Stop Technique Using Diffused P-N Junction for Silicon Micromachined Structures", Proceedings Eighth International Workshop on Physics of Semiconductor Devices (IWPSD-1995), New-Delhi, pp. 484-86, Dec. 1995.
Sudhir Chandra, Ami Chand, and S.C. Rustagi, "Radiation Hardened MOS Integrated Circuits: the SOI Approach," DoE Sponsored Workshop on Radiation Hardened Devices, Mar. 9, 1994.
Sudhir Chandra, S.C. Rustagi, Ami Chand, and G. Bose, "Effect of Substrate Temperature and Laser Power on Recrystallisation of Polysilicon SOI Films for CMOS Circuits", Proc. Seventh International Workshop on Physics of Semiconductor Devices (IWPSD-1993), New-Delhi, pp. 55-58, Dec. 1993.
S.C. Rustagi, Ami Chand, and Sudhir Chandra, "On Measurement of Threshold Voltage and Mobility in Polysilicon Thin Film Transistors", Proceedings, Seventh International Workshop on Physics of Semiconductor Devices (IWPSD-1993), New Delhi, pp.59-61, Dec. 1993.
Ami Chand, Sudhir Chandra, and S.C. Rustagi, "Effect of Post Implant Annealing on MOSFET Parameters in SIMOX Structures", Proceedings, Seventh International Workshop on Physics of Semiconductor Devices (IWPSD-1993), New Delhi, pp.62-64, Dec. 1993.
A.B. Bhattacharyya, Sudhir Chandra, Ami Chand, and S.C. Rustagi , "Polysilicon SOI MOSFETs Using Rapid Thermal Polyoxide as Gate Dielectric", 182nd Meeting of Electrochemical Society, Toronto, Ontario, Canada, Extended Abstract No. 316, pp. 460-61, Oct. 11-16 1992.
A.B. Bhattacharyya, Sudhir Chandra, Ami Chand, and S.C. Rustagi, "Polysilicon SOI MOSFETs Using Rapid Thermal Polyoxide as Gate Dielectric", Proc. of the First Symposium on Thin Film Transistor Technology, Edt. Y.Kuo, Dielectric Science and Technology and Electronics Division, the Electrochemical Society, vol. 92-94, pp. 225-234, 1992.
Ami Chand, Sudhir Chandra, S.C. Rustagi, and A.B. Bhattacharyya, "Rapid Thermal Processing for Improved Polysilicon SOI NMOSFETs", IEEE International SOI Conference, Florida, pp. 92-93, Oct.6-8 1992.
Ami Chand, Sudhir Chandra, S.C. Rustagi, and A.B. Bhattacharyya "Synthesis of SIMOX Substrate for CMOS Technology", Seminar on Physics and Technology of Semiconductor Devices, CEERI Pilani, Sept.21-22, 1992.
A.B. Bhattacharyya, Sudhir Chandra, Ami Chand, and S.C. Rustagi, "Development of High Performance Polysilicon Thin Film MOSFETs", Seminar on Physics and Technology of Semiconductor Devices, CEERI Pilani, Sept.21-22, 1992.
Sudhir Chandra, Raj Ramanand, G. Bose, and Ami Chand, "Laser Recrystallization of Small Grain Polysilicon", Seminar on Physics and Technology of Semiconductor Devices, CEERI Pilani, Sept.21-22, 1992.
Ami Chand, Sudhir Chandra, and A.B. Bhattacharyya, "Oxygen Ion Implantation Using Freeman Ion Source: A Case Study", National Workshop on Ion Implanter Technology, Bangalore, March 1991.
Ami Chand, S.C. Rustagi, S. Chandra, and A.B. Bhattacharyya, "Effect of Post Metal Annealing on Rapid Thermal Oxides for VLSI Application", Proc. Sixth International Workshop on Physics of Semiconductor Devices" (IWPSD-91), p. 528, 1991.
Sudhir Chandra, Seema Amwan and Ami Chand, "Effect of Rapid Thermal Annealing on Hydrogen Implanted Polysilicon SOI MOSFETs", Proc. Sixth International Workshop on Physics of Semiconductor Devices, IWPSD-91, p. 559, 1991.
"Dielectric Properties of Buried Oxides in Oxygen Implanted Silicon on Insulator Structures", Ami Chand, Sudhir Chandra, and S.C. Rustagi, Proc. Sixth International Workshop on Physics of Semiconductor Devices, p. 531, 1991.
G. Bose, Ami Chand, S. Chandra, and, C.M.S. Rauthan, "Ellipsometric Studies of Nitrogen Implanted Silicon," National Workshop on Modification of Materials by Ion Beam, Feb. 25-26, 1988.
B.S. Panwar, Sudhir Chandra, and A.B. Bhattacharyya, "Comparison and Evaluation of Radiation Damages in MZOS and MZNOS SAW Monolithic Structures", IEEE Sonic and Ultrasonic Symposium, Williamsburg, USA, Nov. 1986.
A.B. Bhattacharyya, B.S. Panwar, and Sudhir Chandra, "A New Structure for Monolithic SAW Configurations", Symposium on Surface Waves in Solids and Layered Structures, Moscow, July 1-4, 1986.
"A New Metal-Zinc Oxide- Silicon Dioxide-Silicon Nitride SAW Structure", International Workshop on Physics of Semiconductor Devices (IWPSD-1985), Madras, India, 1985.
S. K. Madan, B. Bhowmik, and S. Chandra, "A New CCD Based Technique to Measure the Interface Trap Density", Int. Workshop on Physics of Semiconductor Devices (IWPSD-1983), New Delhi, 1983.